NONVOLATILE PROGRAMMABLE SWITCH DEVICE AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A nonvolatile programmable switch device and a method for fabricating the same are provided to improve the retention property of the device by separately forming a first electrode and a second electrode for reading, and a third electrode and a fourth electrode for writing. CONSTITUTION: A first electrode(102) is formed on a semiconductor substrate(100). Insulating layers(104a, 108a) comprise pores(110) which expose a part of the first electrode. A heat-generating electrode(106a) is formed on the lateral side of the pores. A phase-changing layer(112) is connected to the first electrode. A second electrode is connected to the phase-changing layer. A third electrode(122) is connected to one side of the heat-generating electrode. A fourth electrode(126) is connected to another side of the heat-generating electrode.