ORGANIC EL DEVICE MANUFACTURING APPARATUS, FILM FORMING APPARATUS, AND LIQUID CRYSTAL DISPLAY SUBSTRATE MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an organic EL device manufacturing apparatus, a film forming apparatus, and a liquid crystal display substrate manufacturing apparatus, capable of reducing warping of a substrate or of a mask to achieve highly accurate deposition, or to provide an organic EL device manufacturing apparatus and a film forming apparatus having high productivity by disposing the driving portion and the like at the atmosphere side to thereby reduce the generation of dust or gas in vacuum, or those having high availability by improving maintainability.

SOLUTION: The organic EL device manufacturing apparatus includes: a substrate holding means holding a substrate in an upright position; a shadow mask drooping means holding a shadow mask 81 in a drooping position; an alignment optical means imaging an alignment mark provided in the substrate and the shadow mask; alignment driving means 83L and 83R driving the shadow mask in a drooping position; and a control means controlling the alignment driving means based on the result of the alignment optical means.

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