| 摘要 |
A simplified startup CVD technique for Siemens type of reactors is disclosed. In one embodiment, a method for production of bulk polysilicon in a CVD reactor assembly includes evacuating stainless steel envelope to have substantially low oxygen content, applying radiant heat (e.g., using a heating element coated with silicon) to the stainless steel enclosure sufficient for raising silicon rods to a firing temperature, flowing process gas (H2) ladened with a silicon reactant material via a process gas inlet and outlet port, applying sufficient current using low-voltage power supply until the silicon rods reach a deposition temperature of the process gas and upon the silicon reactant material reaching the firing temperature, turning off the radiant heat upon reaching the firing temperature, flowing gaseous byproducts of the CVD process out through the process gas outlet port, and removing as a bulk polysilicon product from the stainless steel enclosure. |
