| 摘要 |
<p>Transfer performance in a cluster tool is improved without expanding the space at the bottom of the platform in the perpendicular direction. Within a platform (PF), a first transfer robot (16L) has: a transfer body (48L) which can slidably move on a left side guide rail (46L); a transfer base (50L) which can slidably move in the offset direction (X direction); and a slider-type transfer arm (52L) which can turn within a horizontal plane, which can move straight in a direction parallel to the radius of the turn, and which can support one semiconductor wafer (W). A second transfer robot (16R) also has the same configuration and functions as the first transfer robot (16L), however, the transferring/moving directions of the respective sections are opposite those of the first transfer robot (16L).</p> |
