| 摘要 |
<P>PROBLEM TO BE SOLVED: To drastically enhance control accuracy of optical film thickness, and to contribute to stabilize film forming speed and reduce cost by providing an optical film thickness meter alternative to a quartz film thickness meter. <P>SOLUTION: In an optical film thickness controller of an optical thin film forming apparatus for forming an optical thin film by dispersing film forming materials in a container and depositing the film forming materials on a substrate, the optical film thickness controller includes: a target optical film thickness estimation means for estimating target optical film thickness information, based on transmissivity estimated by a predetermined nonlinear model formula and an amount value of detected light of transmitted light or reflected light measured by an optical receiver to measuring light irradiated to a film to be formed; and an estimation control means for estimating an arrival time to the target optical film thickness information, to indicate an end of film formation when arrived at the arrival time. <P>COPYRIGHT: (C)2010,JPO&INPIT |
