发明名称 ERROR DETERMINATION METHOD, ERROR DETERMINATION DEVICE, POSITION DETECTING METHOD, AND ALGORITHM
摘要 <P>PROBLEM TO BE SOLVED: To provide an error determination method, an error determination device, a position detecting method and algorithm for precisely and easily determining any error included in position signal output from a position detector. Ž<P>SOLUTION: The method is for determining any error included in the position signals shown as two sine wave forms mutually having phase difference of 90 degrees output from the position detector which detects position of the detected object. The error determination method includes: an acquisition process to detect position of the detected object after being relocated at a constant rate by using the position detector at a fixed time interval, and then perform arctangent operation of these two obtained sine wave-shaped position signals to acquire the first data indicating relation between clock time and phase; a regression operation process for performing regression operation of the first data acquired in the acquisition process to determine the second data indicating relation between clock time and phase; and an error determination process for comparing the first data acquired in the acquisition process with the second data determined in the regression operation process to determine the phase error as an error included in the position signals. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010139487(A) 申请公布日期 2010.06.24
申请号 JP20080318934 申请日期 2008.12.15
申请人 CANON INC 发明人 SEO YUZO
分类号 G01D5/244 主分类号 G01D5/244
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