发明名称 METHOD FOR PRODUCING METAL FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for producing a metal film, which uses a compound of low polarity and low viscosity. Ž<P>SOLUTION: The method for producing the metal film includes heat-treating a composition under the existence of a compound expressed by formula 1, wherein R<SP>1</SP>represents a hydrogen atom or an alkyl group having 1-6 carbon atoms; and R<SP>2</SP>and R<SP>3</SP>each independently represent a hydrogen atom, a methoxy group, an alkyl group having 1-6 carbon atoms (wherein the alkyl group having 1-6 carbon atoms may be substituted with a hydroxyl group, an alkoxy group having 1-6 carbon atoms, a cyclic carbonate group or an ether group), or an alkenyl group having 1-6 carbon atoms (wherein R<SP>2</SP>and R<SP>3</SP>may form a ring). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010138426(A) 申请公布日期 2010.06.24
申请号 JP20080313169 申请日期 2008.12.09
申请人 TORAY IND INC 发明人 KANAMORI ONORI;OSETO HIROKI
分类号 C23C24/08;C09D5/24;C09D7/12;C09D201/00;H01B1/20;H01B5/14;H01B13/00;H01L21/28;H01L21/288;H01L21/3205 主分类号 C23C24/08
代理机构 代理人
主权项
地址