| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitance type position detector which interpolates a signal obtained from a mover and can obtain position data with high resolution. Ž<P>SOLUTION: The capacitance type position detector equipped with a stator and the mover opposed to the stator and moving relatively includes a clock signal generating means which generates a clock signal S3 synchronizing with any one phase of an excitation signal and being higher than this signal, a time gate circuit 510 which generates an ON signal in a time between a first characteristic point of a reference signal S1 for a phase difference and a second characteristic point of a detection signal S2, a count circuit 512 which counts, as a count value, the number of the clock signals S3 generated while the time gate circuit 510 generates the ON signal, and a means which determines the ratio of the clock signals S3 counted by the count circuit 512 with clock signals counted when the stator and the mover move relatively through one exciting electrode group, and computes the amount of movement in the above one exciting electrode group. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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