发明名称 CUTTING BLADE DETECTING MECHANISM OF CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting blade detecting mechanism with a light emitting means allowing to uniformly illuminate light emitted from a light emitting surface of a light emitting element on one end faces of a plurality of optical fibers. SOLUTION: The cutting blade detecting mechanism for the cutting device includes the light emitting means disposed on one side of a rotating shaft direction of a cutting blade with an annular cutting edge for cutting a work piece held on a chuck table for holding the work piece, and a light receiving means disposed in opposition to the light emitting means on the other side of the rotating shaft direction of the cutting blade to receive the light emitted by the light emitting means. The light emitting means 6 includes the light emitting element 612, the plurality of optical fibers 621 whose one end faces are disposed in opposition to the light emitting surface of the light emitting element, and a floodlighting part 63 formed by disposing other end faces of the plurality of optical fibers in series in a radial direction of the cutting blade. A cylindrical light scattering spacer 614 whose outer peripheral surface is mirror-finished is disposed between the light emitting element and one end faces of the plurality of optical fibers. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010141009(A) 申请公布日期 2010.06.24
申请号 JP20080314332 申请日期 2008.12.10
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO MASAMI
分类号 H01L21/301;B24B49/12 主分类号 H01L21/301
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