发明名称 |
APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT |
摘要 |
The invention relates to an apparatus for manipulation of an optical element (7) in up to six degrees of freedom with respect to a structure (8) via at least three actuator devices (9). The actuator devices (9) each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points (11) of the actuator devices (9) acting directly on the optical element (7).
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申请公布号 |
US2010157270(A1) |
申请公布日期 |
2010.06.24 |
申请号 |
US20100716357 |
申请日期 |
2010.03.03 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
MUEHLBEYER MICHAEL;LIPPERT JOHANNES |
分类号 |
G03B27/54;G02B7/182;G03F7/20 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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