发明名称 DIE BONDER AND DIE BONDING METHOD USING THE SAME
摘要 <p>PURPOSE: A die bonder and a die bonding method using the same are provided to reduce the time required to perform die bonding work by immediately separating and a eliminating a film from a wafer. CONSTITUTION: A fixing unit(100) adsorbs and fixes a wafer. A film eliminating unit(300) eliminates film from the wafer. A substrate supplier(400) supplies a substrate. An adhesive coating unit(500) coats an adhesive on a die or the substrate. A bonding unit(600) bonds the die on a fixed location of the substrate.</p>
申请公布号 KR20100069291(A) 申请公布日期 2010.06.24
申请号 KR20080127940 申请日期 2008.12.16
申请人 SECRON CO., LTD. 发明人 PARK, JOON SEOUN
分类号 H01L21/58;H01L21/677 主分类号 H01L21/58
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