| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device for inspecting the surface state of an inner circumferential surface of an inspected body while inspecting also the surface state of an outer circumferential surface thereof. SOLUTION: This surface inspection device 1 includes an inspection head 16 provided so that it gets in and out of the interior of the inspected body 100 disposed coaxially therewith, with inspection light projected from a light-transmitting window 16a provided in the outer periphery thereof. The inspection head 16 is moved in the direction of its axis line AX to emit the inspection light toward the inner circumferential surface 100a of the inspected body 100. The surface of the inspected body 100 is inspected based on the light amount of reflected light thereof. The surface inspection device 1 includes first and second outer circumferential surface mirrors 8 and 9. In a position where the light-transmitting window 16a projects from the inspected body 100, the surface mirror 8 causes an optical path of the inspection light projected from the inspection head 16 to change direction to the axis line direction of the inspection head 16 outside the outer circumferential surface 100b of the inspected body 100. The surface mirror 9 causes the optical path, which is caused to change direction by the surface mirror 8, to change direction toward the outer circumferential surface 100b of the inspected body 100. COPYRIGHT: (C)2010,JPO&INPIT
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