| 摘要 |
PURPOSE: A vibrating mirror device is provided to increase the vibration of a mirror by easily transform a beam unit. CONSTITUTION: A vibrating mirror device comprises a substrate, a piezoelectric element, and driving parts(50,60). The piezoelectric element is arranged on the substrate. The substrate comprises a mirror(21) and beam units(22~25). The mirror reflects light. The beam unit is torsionally deformable. The beam unit is connected to the mirror. The beam unit supports the mirror in a vibrating manner. A driving unit drives the mirror through the beam unit. A connecting unit is formed in one end of the driving unit.
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