| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal type flow sensor capable of simplifying a constitution, while suppressing fluctuation of a sensor characteristic. <P>SOLUTION: In this thermal type flow sensor including a sensor chip having a semiconductor substrate whose partial domain having a prescribed depth from one surface is a void domain, an insulating film formed on one surface of the semiconductor substrate so as to bridge the void domain, and a sensing part including a heater arranged on a portion on the void domain as a resister arranged on the insulating film, an upstream side end face in the flow direction of fluid at a normal time between end faces of the semiconductor substrate includes a first inclined plane connected to one surface, and approaching a rear surface in the thickness direction of the semiconductor substrate in proportion to the degree of separation from the heater in the flow direction. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
