| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electrostatic actuator or the like, wherein the manufacturing process and configuration thereof are simplified and removal of residual charges, and so on can be achieved. SOLUTION: The electrostatic actuator includes: individual electrode parts 12A for an electrode 12 serving as a fixed electrode formed on an electrode substrate 10; a vibrating plate 22 serving as a movable electrode that is opposed to the individual electrode parts 12A with a predetermined distance between them and operated by electrostatic force generated between individual electrode parts 12A; an insulation film 13 covering each individual electrode part 12A; and surface protective film 23 directly disposed on a face of the vibrating plate 22, which face is opposed to the individual electrode parts 12A, used to protect the insulation film 13 from friction due to contact, and made of a carbon material. COPYRIGHT: (C)2010,JPO&INPIT |
