| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump having a lengthened effective service life with a simple structure, and a simple operation method of the vacuum pump for lengthening the effective service life. SOLUTION: This device has the vacuum pump 10 including at least one pump stage 12 and a motor 14 for driving the pump stage and a current-carrying device 21. For reducing abrasion of a part of the pump stage, the device has a measuring device 24 for determining an electric operation variable. This invention also relates to an operation method of the vacuum pump 10 having the motor 14. Here, the invention proposes to measure electric power consumption of the motor and to reduce a rotating speed of the motor when the electric power consumption is reduced. COPYRIGHT: (C)2010,JPO&INPIT |
