AN APPARATUS FOR COMPUTING DISTANCE DATA BETWEEN LAYERS OF SUBSTRATE USING CCD CAMERA AND COMPUTING METHOD OF DISTANCE DATA BETWEEN LAYERS OF SUBSTRATE

摘要

PURPOSE: An apparatus for computing distance data between layers of a substrate by using CCD(Charge Coupled Device) camera and a calculating method thereof are provided to precisely control the depth in a hole processing method for interconnection by removing fault generation risk due to deviation of insulated distance. CONSTITUTION: An apparatus(100) for computing distance data between layers of a substrate by using CCD camera comprises a work table(110), a drilling unit(130) for test, a CCD camera(140), and an output unit(150). A test board(120) is positioned in the work table. The drill bit of the drilling unit for test forms a test hole on the test board of the work table. The CCD camera photographs the test hole. The output unit produces the inter-layered distance data of the teat board from the image.