| 摘要 |
PURPOSE: A silicon solar cell, a method and an apparatus for manufacturing a thereof are provided to reduce a process time since a selective emitter is formed through one time screen printing and one time rapid heat treatment. CONSTITUTION: A silicon solar cell, a method and an apparatus for manufacturing a thereof are comprised of the steps: printing a dopant paste(230) on the whole front of a silicon wafer(200) by using screen masks having a different thickness of a pattern on it, so the thickness of the dopant paste is different; performing a rapid heat treatment to the silicon wafer in the state when the impurity paste is formed; and forming a low and a high impurity concentration region according to the thickness of dopant paste. |
