发明名称
摘要 The arrangement has at least one treatment device for accommodating at least one workpiece, a rotor on which the treatment device is arranged, a rotary fluid lead through (182) for feeding at least one fluid to the rotor and/or carrying at least one fluid away from it with a journal (102) and a sleeve (104) that are at least partly sealed relative to each other with the journal rotatably arranged in the sleeve. - An INDEPENDENT CLAIM is also included for a rotary fluid leadthrough device for an inventive arrangement.
申请公布号 JP4485868(B2) 申请公布日期 2010.06.23
申请号 JP20040208679 申请日期 2004.07.15
申请人 发明人
分类号 C23C16/44;C23C16/50;F16L39/04 主分类号 C23C16/44
代理机构 代理人
主权项
地址