发明名称 |
MEASUREMENT OF COMPLEX SURFACE SHAPES USING A SPHERICAL WAVEFRONT |
摘要 |
<p>Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g., spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference wavefronts.</p> |
申请公布号 |
EP1436570(B1) |
申请公布日期 |
2010.06.23 |
申请号 |
EP20020773388 |
申请日期 |
2002.09.13 |
申请人 |
ZYGO CORPORATION |
发明人 |
DE GROOT, PETER, J.;COLONNA DE LEGA, XAVIER |
分类号 |
G01B9/02;G01B11/24;G01N21/45;G01N21/95 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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