发明名称 Vibration suppression apparatus, exposure apparatus, and method of manufacturing device
摘要 <p>A vibration suppression apparatus includes three first actuators (20), at least one second actuator (20), detectors (3a-3c, 4a-4c), and a controller (40). The first actuators (20) and second actuator (20) support a structure (1) by applying forces to the structure (1) in the vertical direction or horizontal direction, and do not align themselves on the identical straight line. The detectors (3a-3c, 4a-4c) detect at least one of vibration and a position of the structure (1) with respect to a reference position. The controller (40) controls the forces, applied to the structure (1) by the first actuators (20), based on the outputs from the detectors (3a-3c, 4a-4c). The second actuator (20) is controlled so that a force applied to the structure (1) in the vertical direction or horizontal direction is maintained constant. </p>
申请公布号 EP2098750(A3) 申请公布日期 2010.06.23
申请号 EP20090003049 申请日期 2009.03.03
申请人 CANON KABUSHIKI KAISHA 发明人 MAYAMA, TAKEHIKO;TAKABAYASHI, YUKIO
分类号 F16F15/027 主分类号 F16F15/027
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