发明名称 Semiconductor device with multilayered metal pattern
摘要 A semiconductor device comprises a first insulating film formed on a semiconductor substrate, a first metal pattern formed on the first insulating film, a second insulating film formed on the first metal pattern, a second metal pattern formed on the second insulating film, and a third metal pattern formed in the second insulating film and connecting between the first metal pattern and the second metal pattern. The third metal pattern is a single continuous structure, and the principal orientation axes of crystals of a metal constituting the third metal pattern are parallel to the principal surface of the semiconductor substrate.
申请公布号 US7741207(B2) 申请公布日期 2010.06.22
申请号 US20070984127 申请日期 2007.11.14
申请人 PANASONIC CORPORATION 发明人 HASHIMOTO SHIN;MIMURA TADAAKI
分类号 H01L21/768;H01L23/48;H01L21/28;H01L21/283;H01L21/66;H01L23/485;H01L23/522;H01L23/532 主分类号 H01L21/768
代理机构 代理人
主权项
地址