发明名称 APPARATUS AND METHOD OF ORGANIC THIN FILM FORMATION
摘要 PURPOSE: An apparatus and a method for forming an organic thin film are provided to smoothly transfer organic compounds to a substrate by maintaining the flatness of a donor and the substrate. CONSTITUTION: An upper plate(140) supports a substrate. A lower plate(150) supports a donor on which organic compounds are applied. Light source emits light toward the donor. The light passes through a transmissive plate(153). The upper plate and the lower plate are contained in a chamber(110). The chamber includes a transmissive window(115) through which the light is transmitted.
申请公布号 KR20100068112(A) 申请公布日期 2010.06.22
申请号 KR20080126835 申请日期 2008.12.12
申请人 LIGADP CO., LTD. 发明人 SEO, SANG WON
分类号 H05B33/10;H01L51/56 主分类号 H05B33/10
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