发明名称 |
Compound sliding seal unit suitable for atmosphere to vacuum applications |
摘要 |
The present invention is a compound sliding seal unit of markedly reduced size and height dimensions which is employed as a discrete assembly for both the passage across and the at-will height adjustment of a mounted, rotatable shaft which extends from the atmospheric environment portion into the vacuum environmental portion of an ion implanter apparatus. The extended, rotatable shaft is typically fashioned as either a rotatable hollow tube or conduit (suitable for the passage of electrical components) and/or as a rotatable support suitable for the mounting of a pivotal scanning radial arm translation system. The manner of construction and the substantially reduced height dimensions of the compound sliding seal unit permits on-demand changes of height for the mounted, rotatable shaft which extends from the atmospheric environment and extends through the compound unit into the confined and limited spatial volume of a vacuum environment within a conventional ion implantation apparatus. The compound unit also allows the user to maintain a high vacuum within the vacuum environment despite the fact that the height of the feed-through member can be raised and lowered repeatedly at will. Its compact size frees space which can be used to extend the vacuum chamber for purposes such as a deep Faraday cup for beam measurement.
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申请公布号 |
US7740247(B2) |
申请公布日期 |
2010.06.22 |
申请号 |
US20080283183 |
申请日期 |
2008.11.10 |
申请人 |
ADVANCED ION BEAM TECHNOLOGY, INC. |
发明人 |
MCRAY RICHARD F.;WHITE NICHOLAS R. |
分类号 |
F16K3/28;G03B27/64 |
主分类号 |
F16K3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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