| 摘要 |
PURPOSE: A system for measuring the rotation angle of a galvanometer is provided to reduce the location error of a galvanometer scanner by including a rotation angle measurement unit which measures the location of the galvanometer scanner between a mirror and a motor. CONSTITUTION: A galvanometer scanner(10) rotates by interlocking with the rotary shaft of a motor. The galvanometer scanner reflects a laser beam to a direction which is different from an incident direction. A rotation angle measurement unit(20) is installed on the galvanometer scanner. The measurement unit outputs a voltage based on the rotation angle of a mirror. A Laser(30) radiates a laser beam toward the mirror. A control unit(40) analyzes the rotation location of the mirror using the output voltage. |
