POLYMERIZABLE COMPOUND, LACTONE-CONTAINING COMPOUND, METHOD FOR MANUFACTURING LACTONE-CONTAINING COMPOUND AND POLYMER COMPOUND OBTAINED BY POLYMERIZING THE POLYMERIZABLE COMPOUND

摘要

PURPOSE: A polymerizable compound having lactone structure is provided to use as a raw material of polymer compound used in a resist composition in lithography process. CONSTITUTION: A polymerizable compound having lactone structure is denoted by general formula 1, 2, or 3. A lactone-containing compound is denoted by general formula 4. The lactone-containing compound is prepared by reacting a carboxylic acid-containing compound of general formula 5 with alcohol. The polymer compound is prepared by polymerizing the polymerizable compounds.