| 摘要 |
PURPOSE: An imprint apparatus are provided to solve a problem of external structure by including a curing unit built in a chamber part. CONSTITUTION: A chamber part(2) offers a chamber(S) of a constant size. A stamp(4) includes imprint surface(K1) compartmentalizing a etching region and non-etching is arranged in the substrate. A stage(6) has a loading plane for loading a substrate and is arranged in lower part of the stamp. A driving part(8) drives stamp or the stage up and down.
|
