| 摘要 |
<p>PURPOSE: A coating method and a coating device using a capillary phenomenon are provided to improve coating performance of a solution by micro-processing the lower side of a capillary plate in order to increase a surface tension. CONSTITUTION: A chuck table(10) vacuum-absorbs a substrate(W). A rotary shaft(11) is located on the lower side of the chuck table. The height of rotary shaft is controlled by an elevation device(16). A flexible blocking tube(17) prevents external pollutants from flowing into the inside of a reaction chamber(2). A capillary plate(20) is located on the upper side of the chuck table. A solution injection unit(22) injects a coating solution between the substrate and the capillary plate.</p> |
