APPARATUS FOR REMOVING FOREIGN MATTER ON SURFACE OF GLASS-SUBSTRATE

摘要

PURPOSE: An apparatus for removing a foreign material of glass substrate surface is provided to minimize fault by defect by removing defect on the glass substrate surface. CONSTITUTION: An apparatus(20) for removing a foreign material of glass substrate surface comprises: a transfer part(21) which transfers a glass substrate and a removing part(23) which removes a foreign material attached on the glass substrate surface. The removing part for foreign materials of the glass substrate surface is a carbon structure. The removing part comprises: a sensor(22) sensing the glass substrate, a moving unit(232) which moves the removing part upward or downward, and a controller(24) which controls operation of the moving unit.