| 摘要 |
PURPOSE: A probe card exchanger is provided to stably exchange a probe card using a mounting unit which is separately operates regardless of a driving unit in order to mount the probe card to an interface. CONSTITUTION: A probe card(44) is mounted on a card holder(52). The card holder is mounted on a carrier. A guide slide transfers the carrier to the Y-axis direction of a chuck transferring apparatus. A first driving unit transfers the carrier to a first location which corresponds to a lower side of an interface(46). A second driving unit transfers the carrier on the first location to the second location of the interface. A mounting unit separates the card holder and mounts the card holder on the interface.
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