| 摘要 |
PURPOSE: An indexer which includes an over-load preventive structure for a driving motor is provided to prevent the over-load of the driving motor by separately rotating lead-screws on the plate of the indexer with two timing belts. CONSTITUTION: An entrance is formed by opening the lateral side of a body frame(110). A wafer cassette is settled on a plate(130) in the body frame. A driving part(200) lifts the plate to a vertical direction. The driving part includes two or more lead screws(210) and a driving motor(270). The lead screws lift the plate to a vertical direction. The driving motor rotates the lead screws to a normal or a reverse direction.
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