发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to minimize the size of the device by vertically forming a drain and a gate on a trench. CONSTITUTION: A first trench is formed on a semiconductor substrate(100). First ion implantation layers(120a,120b) are formed on the surface of the semiconductor substrate and the bottom side of the first trench. A second gate(125b) is formed from the bottom side of both the sidewalls of the first trench to the middle part of the trench. A second trench which passes through the middle part of the first ion implantation layer on the bottom side of the first trench is formed. A drift region(130) is formed on the second trench. A second ion implantation layer(140) is formed on the inner surface of the second trench.
申请公布号 KR20100066966(A) 申请公布日期 2010.06.18
申请号 KR20080125503 申请日期 2008.12.10
申请人 DONGBU HITEK CO., LTD. 发明人 YOON, CHUL JIN
分类号 H01L21/336;H01L21/265 主分类号 H01L21/336
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