A STRUCTURE OF A CIRCUIT PATTERN FOR CONTROLLING DEFORMATION OF A SUBSTRATE

摘要

PURPOSE: A wiring pattern structure for a transforming control of a substrate is provided to control of a deformation of the substrate by controlling a wiring width of a wiring pattern. CONSTITUTION: A wiring pattern(30) formed on an insulating layer(20) has a structure where a wiring width changes into the horizontal direction. A sidewall wiring width(Ws) of the wiring pattern is formed smaller than an inner wiring width(Wi). The wiring pattern is formed on the substrate for controlling a deformation control of a substrate. The wiring width of a central part is formed the most in the wiring pattern. The wiring pattern has the symmetrical wiring width based on the central part.