| 摘要 |
<p>An electro-mechanical system for the collection and recovery of materials inside thin-film deposition facilities, comprising multiple elements able to intercept the wasted particles of material during a coating process. These elements are disposed in individual modules (1, 5), possibly combined in multiple configurations according to the shape of the deposition chamber; swivel, depending on the material to be recovered, thanks to a power unit (4), a transmission system (6, 10, 15a, 15b), an electronic interface (9) to automate the rotation of the elements. These elements can be palettes (3) placed vertically in each of the modules (1, 5), made of a composite material, characterized by a core of metallic material or alumina and by two surface polymeric layers with low adhesion to the selected core and therefore easily removable, but at the same time resistant to the temperature and pressure conditions inside the deposition is chamber.</p> |
