发明名称 APPARATUS FOR ANISOTROPIC FOCUSING
摘要 <p>A substantially planar assembly for depositing material. The assembly comprises plates which, when assembled, define at least one aerosol channel, a sheath gas plenum, and a nozzle. These components are preferably anisotropic, and preferably rectangular. The aerosol channel may be divided further to improve uniformity of aerosol flow.</p>
申请公布号 KR20100067098(A) 申请公布日期 2010.06.18
申请号 KR20107007089 申请日期 2008.09.02
申请人 OPTOMEC, INC. 发明人 KING BRUCE H.;WOOLFSON STEVEN BARRY;RAMAHI DAVID H.
分类号 B05B1/14;B05B1/28;C23C16/00;H01L21/44 主分类号 B05B1/14
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