发明名称 SILICA GLASS CRUCIBLE FOR PULLING UP SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING THEREOF
摘要 A silica glass crucible for pulling up a silicon single crystal including an outer layer formed from a natural silica glass layer, and an inner layer formed from a synthetic silica glass layer, wherein the synthetic silica glass layer includes a first synthetic silica glass layer formed in a region within a certain range from the center of a crucible bottom section, and a second synthetic silica glass layer formed in a region which excludes the formation region of the first synthetic silica glass layer, and wherein the first synthetic silica glass layer has a thickness of 0.5 mm or more and 1.5 mm or less and a concentration of an OH group included in the first synthetic silica glass layer being 100 ppm or less.
申请公布号 US2010147213(A1) 申请公布日期 2010.06.17
申请号 US20090632970 申请日期 2009.12.08
申请人 JAPAN SUPER QUARTZ CORPORATION 发明人 HARADA KAZUHIRO;MORIKAWA MASAKI;KUDO SATOSHI
分类号 C30B15/10;C03B9/00 主分类号 C30B15/10
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