摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dielectric material for an electronic device which has a good electric insulating property and has a good compatibility with semiconductor materials. <P>SOLUTION: The electronic device includes (a) a semiconductor layer and (b) a dielectric structure including a low-k dielectric polymer and a high-k dielectric polymer. In the region of the dielectric structure which is nearest to the semiconductor layer, the low-k dielectric polymer has a lower concentration than the high-k dielectric polymer. Also, in the region of the dielectric structure which is nearest to the semiconductor layer, it is preferable that the low-k dielectric polymer has a concentration belonging to the range of about 40 to about 10 wt.% and the high-k dielectric polymer has a concentration belonging to the range of about 60 to about 90 wt.%. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |