发明名称 ELECTRONIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a dielectric material for an electronic device which has a good electric insulating property and has a good compatibility with semiconductor materials. <P>SOLUTION: The electronic device includes (a) a semiconductor layer and (b) a dielectric structure including a low-k dielectric polymer and a high-k dielectric polymer. In the region of the dielectric structure which is nearest to the semiconductor layer, the low-k dielectric polymer has a lower concentration than the high-k dielectric polymer. Also, in the region of the dielectric structure which is nearest to the semiconductor layer, it is preferable that the low-k dielectric polymer has a concentration belonging to the range of about 40 to about 10 wt.% and the high-k dielectric polymer has a concentration belonging to the range of about 60 to about 90 wt.%. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010135793(A) 申请公布日期 2010.06.17
申请号 JP20090274818 申请日期 2009.12.02
申请人 XEROX CORP 发明人 WU YILIANG;SMITH PAUL F
分类号 H01L29/786;H01L21/312;H01L21/822;H01L27/04;H01L51/05;H01L51/30;H05B33/14 主分类号 H01L29/786
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