| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflecting anodic electrode for organic EL displays which has such an Al alloy reflecting film that it attains a low contacting resistance with an oxide conductive film, and can achieve its excellent reflecting coefficient. SOLUTION: A manufacturing method of the reflecting anodic electrode for organic EL displays has a process for forming an Al alloy film containing Ni or Co of 0.1-2 atomic% on a substrate, a process for heat-processing the Al alloy film at a temperature not lower than 150°C in a vacuum or inert-gas atmosphere, and a process for forming then an oxide conductive film so as to be contacted with the Al alloy reflecting film directly. COPYRIGHT: (C)2010,JPO&INPIT
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