MONOLITHIC OPTOELECTRONIC TWE-COMPONENT STRUCTURE FOR HIGH FREQUENCIES AND LOW OPTICAL INSERTION LOSS

摘要

A monolithic optoelectronic device has a spot-size converter optically connected to a waveguide. The overclad extending over the core of the waveguide is thinner and more highly doped that the overclad of the spot-size converter. This structure can be made by applying a process of selective etching and enhanced regrowth to create selective regions of the overclad of different thickness or doping.