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发明名称
Testeinrichtung für mikromechanische Bauelemente
摘要
申请公布号
DE102007016735(B4)
申请公布日期
2010.06.17
申请号
DE200710016735
申请日期
2007.04.03
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
KURTH, STEFFEN;BOEHME, MICHAEL
分类号
B81C99/00;G01M7/02;G01B9/02
主分类号
B81C99/00
代理机构
代理人
主权项
地址
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