SUBSTRATE TRANSPORT DEVICE, SUBSTRATE INSPECTION DEVICE, AND SUBSTRATE TRANSPORT METHOD

摘要

PROBLEM TO BE SOLVED: To prevent unnecessary contact between an arm and a substrate in a substrate transport device, a substrate inspection device and a substrate transport method.

SOLUTION: A wafer transport device 1 includes: a pair of arm parts 2 and 3 having wafer placing surfaces 2a and 3a for placing a wafer W and arranged parallel mutually; balancers (weights) 4 and 5 serving as tilting means tilting the wafer placing surfaces 2a and 3a (arm parts 2 and 3) to the horizontal plane by using the longitudinal direction of the arm parts 2 and 3 as turning axes A2 and A3; an arm support part 6; arm side suction tubes 7 and 8 serving as suction tubes; a support part side suction tube 9; and transmission sensors 10 and 11 serving as inclination detection means.

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