| 摘要 |
<P>PROBLEM TO BE SOLVED: To secure electric interengagement between a lead electrode and an upper electrode film, to increase the displacement magnitude of an actuator device, to increase ink quantity capable of being discharged by a liquid discharge device to print at high speed, and to reduce volume of a pressure generating chamber to miniaturize a liquid discharge head. Ž<P>SOLUTION: There is little possibility to completely remove the upper electrode film 80 when forming an opening 100a even though etching fluctuates because the opening part 100a is provided on a protecting film 100 arranged in the thick second area of the upper electrode film 80, and the upper electrode film 80 is exposed in a wide area in the opening part 100a, thereby the connection between the lead electrode 90 and the upper electrode film with lower resistance can be obtained. On the other hand, the first area of the upper electrode film 80 is thin, and disturbance to the displacement of a piezoelectric element active section 320 constituted of the first area of the upper electrode film 80, a substrate, the elastic film 50, a lower electrode film 60, and a piezoelectric element layer 70 by the upper electrode film 80 can be reduced, thereby a piezoelectric actuator 310 with large displacement and large ink discharge quantity can be obtained. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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