| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illuminating device restrained from becoming large-sized, and to provide an exposure device and a method of manufacturing the device. <P>SOLUTION: The illuminating device includes: a light source device that emits illuminating light from an emitting part disposed at a first height with respect to a reference surface; a first optical system having an incident part disposed at a second height lower than the first height with respect to the reference surface and irradiating an object with the illuminating light that entered the incident part; and a second optical system having an optical axis inclined with respect to the reference surface between the first height and the second height and guiding the illuminating light emitted from the emitting part, to the incident part. <P>COPYRIGHT: (C)2010,JPO&INPIT |
