PELLICLE STORAGE CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide a pellicle storage container that can be made lightweight and can maintain the quality of a pellicle highly.

SOLUTION: The pellicle storage container 1 is provided for transporting a pellicle having a pellicle membrane and a support frame supporting the pellicle membrane by storing the pellicle in a space formed by a tray 4 and a cover 1A disposed opposing to the tray 4. The storage container 1 has a holding member 2 for holding the support frame, wherein the holding member 2 is disposed on the tray 4 with an elastic member 3 interposed.

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