SEMICONDUCTOR PRESSURE SENSOR, AND METHOD FOR MANUFACTURING THE SAME

摘要

<P>PROBLEM TO BE SOLVED: To lower the height of a semiconductor pressure sensor by forming the semiconductor pressure sensor on a single semiconductor substrate. Ž<P>SOLUTION: This pressure sensor includes: a chamber part 105 formed hollowly by removing by etching selectively a semiconductor substrate 101 through an etching opening part 205 formed on the semiconductor substrate 101: a diaphragm part 107 formed over the chamber part 105, for receiving and detecting a pressure; and a sealing part 106 for sealing the chamber part by blocking the etching opening part 205. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž