发明名称 SURFACE TEXTURIZATION METHOD
摘要 A surface texturization method is provided. First, a polymer film is formed on a substrate. Thereafter, a heating treatment is performed on the substrate. The heating treatment results in a textured polymer film having island-shaped and/or microcrack-shaped patterns. Afterwards, an etching process is performed using the textured polymer film as a mask, so as to remove a portion of the substrate to form a textured structure on the surface of the substrate.
申请公布号 US2010147798(A1) 申请公布日期 2010.06.17
申请号 US20090371634 申请日期 2009.02.16
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LIN CHING-HSI;DU CHEN-HSUN;LAN CHUNG-WEN
分类号 B44C1/22 主分类号 B44C1/22
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