| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing trichlorosilane with a high recovery rate of trichlorosilane by suppressing decomposition of trichlorosilane and formation of polymers in a step of cooling a gas formed by the conversion reaction. SOLUTION: This method for producing trichlorosilane includes a method for recovering trichlorosilane by cooling a reacted gas containing trichlorosilane, dichlorosilylene, hydrogen chloride and higher order silane compounds, formed by conversion reaction of raw material tetrachlorosilane and hydrogen at a temperature of 1,000-1,900°C, where the method is characterized by including: (a) a first cooling step of cooling the reacted gas extracted from a conversion furnace to ≥600°C within 0.01 second and to ≤500°C within 2 second from the start of cooling; (b) an intermediate reaction step of holding the reacted gas after the first cooling step in a temperature range of 500-950°C for 0.01-5 second; and (c) a second cooling step of cooling the reacted gas after the intermediate reaction step to a temperature lower than 500°C. COPYRIGHT: (C)2010,JPO&INPIT |
