| 摘要 |
An insert apparatus for a substrate coating system, the insert apparatus including an insert element for being operated within a coating system, the insert element including a processing bench, the processing bench adapted for receiving a coating tool for applying a coating to a substrate, a carrier for carrying the insert element, a first positioner collaborating with the carrier for inserting the insert element into a processing chamber of the coating system and/or retracting the insert element from the processing chamber, and a second positioner for fine positioning of the insert element within the processing chamber.
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