An antireflective coating composition comprises a) a compound having the formula (4) where X is selected from (1 ) or (2) where U is a divalent linking group; Y is hydrogen or Z; and Z is the residue of an aromatic epoxide or aliphatic epoxide; and b) an acid or acid generator.
申请公布号
WO2010043946(A3)
申请公布日期
2010.06.17
申请号
WO2009IB07116
申请日期
2009.10.13
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
LIU, WEIHONG;LIN, GUANYANG;CHO, JOON, YEON;YIN, JIAN;MULLEN, SALEM, K.;NEISSER, MARK
