发明名称 A SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PURPOSE: A semiconductor device and a method for manufacturing the same are provided to improve the mobility on a channel surface by using a grown silicon for the channel. CONSTITUTION: In a semiconductor device and a method for manufacturing the same, an element isolation film and a source/drain region are formed on a substrate. A gate structure is formed on the substrate. A spacer is formed on both sides of the gate structure. A silicon epitaxial layer(210) is formed on the substrate. A gate oxidation film(220) is formed on the silicon epitaxial layer. The gate electrode(230) is formed on the gate oxidation film.</p>
申请公布号 KR20100065844(A) 申请公布日期 2010.06.17
申请号 KR20080124413 申请日期 2008.12.09
申请人 DONGBU HITEK CO., LTD. 发明人 CHO, YONG SOO
分类号 H01L21/336;H01L21/205;H01L29/78 主分类号 H01L21/336
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